Ultra High Vacuum Systems

Exhaust Cart

Cryo Pump Type	Vacuum Line
	Mainfold Main Valve Forel Valve Rough Valve Vent Valve Leak Valve Cryo Pump Rotary Pump Oil Mist Trap Fore LineTrap Pirani Gauge Pirani Gauge

Features

• The equipment can mount fifty heads at the same time. GMT can be mass produced with this system
• It can improve the producitivity by claming 50 heads automaically at the same time by one- touch.
• One operator can mange three and four equipment as it is fully automatic
• It is easy to repair as power supply is separated
• It is controled fully automatic from the start to the end of the system by signed "ON" in filament lights which are consisted 12 grades
• It is easy to take actions as error signal is on when the equipment is in troubles

System Configuration

• Profile frame
• Vaccum exhausting equipment
• System Controller
• Baking case
• Head automatic seal unit
• Tip-off unit
• Continuous current/ Continuous voltage unit
• Electric control panel