Ultra High Vacuum System

Exhaust Cart

Cryo & Roots Pump Type	Vacuum Line
	Vacuum Belljar Main Valve Rough Valve Forel Vent Valve Leak Valve Cryo Pump Roots Vaccum Pump Rotary Pump Penning Gauge Pirani Gauge

Features

• The equipment is socket type and easy to work. The equipment can mount 120 MGT filaments at the same time.
• Improved work efficiency due to light work pallets
• It is easy to make actions as error signal is on when the equipment are in troubles
• It is fully automatic from the start to the end of the system
• It is fully automatic controlled as it is continuous voltage and continuous current type
• It is easy to repair as power supply is separated

System Configuration

• Frame
• Belljar
• Power supply unit and work pallet
• Vacuum exhausting equipment
• System controll
• Continuous current/Continuous voltage unit
• Gas supply unit
• Electric control panel